Dr. Christoph Meinecke Profile

Dr. Christoph Meinecke

at Technische Univ Chemnitz

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Publications (1)

Proceedings Article | 19 September 2018 Paper

Approach to combine electron-beam lithography and two-photon polymerization for enhanced nano-channels in network-based biocomputation devices

G. Heldt, Ch. Meinecke, S. Steenhusen, T. Korten, M. Groß, G. Domann, F. Lindberg, D. Reuter, St. Diez, H. Linke, St. Schulz

Proceedings Volume 10775, 1077517 (2018) https://doi.org/10.1117/12.2326598

KEYWORDS: Two photon polymerization, Electron beam lithography, Semiconducting wafers, Silicon, Etching, Photomasks, Network architectures, Gold, Chromium, Scanning electron microscopy

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