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Jun Cheng
at Univ of Shanghai for Science and Technology
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Author
Publications (4)
Proceedings Article | 19 December 2022 Poster + Paper
Research on interferometric inspection of surface topography of ring elements
Proceedings Volume 12319, 123191F (2022) https://doi.org/10.1117/12.2643403
KEYWORDS: Equipment, Optical components, Mirrors, Design and modelling, Interferometers, Metals, Inspection, Interferometry, Spherical lenses, Technology
Proceedings Article | 19 December 2022 Poster + Paper
Interferometric measurement of thickness variation of double-sided polished wafer
Proceedings Volume 12319, 123191B (2022) https://doi.org/10.1117/12.2643049
KEYWORDS: Photovoltaics, Polishing, Interferometers, Reliability, Interferometry, Phase interferometry, Semiconducting wafers, Wafer bonding, Surface finishing, Phase shifts
Proceedings Article | 19 December 2022 Poster + Paper
Simulation verification for the cause of overlapped interference fringes in homogeneity measurement of quartz substrate
Proceedings Volume 12319, 123191D (2022) https://doi.org/10.1117/12.2643369
KEYWORDS: Optical components, Zemax, Beam splitters, Interferometers, Quartz, Wavefronts, Collimation, Photomasks, Beam expanders, Fizeau interferometers
Proceedings Article | 19 December 2022 Poster + Paper
Simulation research of illumination system with coherent noise suppression
Proceedings Volume 12319, 123191A (2022) https://doi.org/10.1117/12.2642907
KEYWORDS: Beam splitters, Light sources, Scattering, Interferometers, Sensors, Light scattering, Laser scattering, Interferometry, Light, Fizeau interferometers
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