Dr. Bryan Sundahl Profile

Dr. Bryan Sundahl

at SandBox Semiconductor

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Author

Publications (4)

Proceedings Article | 26 May 2022 Poster + Paper

Automated extraction of critical dimension from SEM with Weave

Yang Ban, Bryan Sundahl, Jawad Ahmed, Crystal Barrera, S.V. Sreenivasan, Roger Bonnecaze, Meghali Chopra

Proceedings Volume 12053, 1205327 (2022) https://doi.org/10.1117/12.2614282

KEYWORDS: Scanning electron microscopy, Image segmentation, Artificial intelligence, Image processing, Process engineering, Image analysis, Wet etching, Semiconductors, Neural networks, Metals

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Automated extraction of critical dimension from SEM images with WeaveTM

Leandro Medina, Bryan Sundahl, Roger Bonnecaze, Meghali Chopra

Proceedings Volume 11611, 1161135 (2021) https://doi.org/10.1117/12.2583900

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Proceedings Article | 22 February 2021 Presentation + Paper

Fast etch recipe creation with automated model-based process optimization

Yang Ban, Kara Kearney, Bryan Sundahl, Leandro Medina, Roger Bonnecaze, Meghali Chopra

Proceedings Volume 11615, 116150L (2021) https://doi.org/10.1117/12.2583868

KEYWORDS: Process modeling, Etching, Optimization (mathematics), Model-based design, 3D modeling, Calibration, Statistical modeling, Statistical analysis, Space mirrors, Process engineering

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Proceedings Article | 23 March 2020 Presentation + Paper

Optimal etch recipe prediction for 3D NAND structures

Leandro Medina, Bryan Sundahl, Meghali Chopra, Roger Bonnecaze

Proceedings Volume 11329, 113290C (2020) https://doi.org/10.1117/12.2552121

KEYWORDS: Etching, Calibration, 3D modeling, Process modeling, Solid modeling, Silicon, Model-based design, Data modeling, 3D acquisition, Visual process modeling

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