In this work we use electron spin resonance (ESR) spectroscopy to investigate defects in dual ion beam sputtered HfO2
and SiO2 films. "As-grown" SiO2 films exhibit an ESR feature consistent with an E' center associated with an oxygen
vacancy previously reported. A similar feature with axial symmetry is seen in HfO2 films. The defect giving rise to the
HfO2 ESR feature is distributed throughout the film. In addition, post process annealing of HfO2 and SiO2 films greatly
reduces these defects.
We present a complete systematic study on the effect of assist beam energy on SiO2/HfO2 quarter wave stacks deposited
by dual ion beam sputter (DIBS) deposition. Increasing assist beam energy results in lower surface roughness and
reduced micro-crystallinity. The coatings also show reduced mechanical stress. The improvements in the structural
properties are accompanied by a reduction in the absorption loss and an increase in the laser resistance to damage at 1
μm.
We investigate the variations that occur with changes in the number of layers and with the use of the assist beam
main and assist beam energy on the morphology of HfO2/SiO2 quarter wave stacks deposited by dual ion beam
sputtering. We show how the addition of sequential HfO2/SiO2 bilayers, up to eight, affects the surface roughness
and micro-crystallinity of the top HfO2 layer. We also show that use of the assist source significantly smooths the
surface while simultaneously reducing microcrystallinity. The HfO2/SiO2 structures are very robust and can
withstand fluences in excess of 3 J/cm2 generated by 1ps pulses from a chirped amplified Ti:Sapphire laser.
We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by
focusing the output of a capillary discharge soft x-ay laser with a Fresnel zone plate. We also report the first
demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.
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