Dr. Bart Berenbak Profile

Dr. Bart Berenbak

at SolMateS BV

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Publications (1)

Proceedings Article | 4 March 2022 Presentation + Paper

Pulsed laser deposition systems and lasers for pilot and volume production

Ralph Delmdahl, Oliver Haupt, Bart Berenbak, Lennart de Vreede, Arjen Janssens

Proceedings Volume 11989, 119890K (2022) https://doi.org/10.1117/12.2606173

KEYWORDS: Thin films, Sputter deposition, Manufacturing, Laser applications, Laser stabilization, Aluminum nitride, Excimer lasers, Pulsed laser deposition, Thin film deposition, Semiconducting wafers

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