Ms. Annika-Verena Häcker Profile

Annika-Verena Häcker

at Ilmenau University of Technology

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Publications (2)

Proceedings Article | 3 October 2023 Presentation + Paper

Investigation on the lithographic process of a high-precision direct laser writing system

Annika-Verena Häcker, Jaqueline Stauffenberg, Eberhard Manske

Proceedings Volume 12653, 126530A (2023) https://doi.org/10.1117/12.2677297

KEYWORDS: Voxels, Mirrors, Reflection, Sensors, Objectives, Light sources and illumination, Bragg cells, Nanofabrication, Laser systems engineering, Multiphoton lithography

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Proceedings Article | 4 March 2022 Presentation + Paper

Modifications to a high-precision direct laser writing setup to improve its laser microfabrication

Annika-Verena Häcker, Laura Mohr-Weidenfeller, Clara F. Stolzenberg, Carsten Reinhardt, Eberhard Manske

Proceedings Volume 11989, 119890U (2022) https://doi.org/10.1117/12.2609417

KEYWORDS: Lithography, Femtosecond phenomena, Photons, Beam expanders, Photosensitive materials, Direct write lithography, Multiphoton lithography, Absorption

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