Dr. Amalia Torre Profile

Dr. Amalia Torre

at ENEA

SPIE Involvement:

Author

Proceedings Article | 3 January 2019 Paper

The ENEA discharge produced plasma extreme ultraviolet source and its patterning applications

L. Mezi, S. Bollanti, S. Botti, G. Brusatin, L. Businaro, G. Della Giustina, P. Di Lazzaro, M. Fagnoni, F. Flora, A. Gerardino, D. Murra, S. Protti, A. Torre, E. Torti

Proceedings Volume 11042, 110420Z (2019) https://doi.org/10.1117/12.2522469

KEYWORDS: Extreme ultraviolet, Plasma, Graphene, Photomasks, Optical lithography, Extreme ultraviolet lithography, Spatial resolution, Silicon, Photoresist materials, Lithography

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Proceedings Article | 30 January 2013 Paper

Extreme ultraviolet marking system for anti-counterfeiting tags with adjustable security level

P. Di Lazzaro, S. Bollanti, F. Flora, L. Mezi, D. Murra, A. Torre, F. Bonfigli, R. M. Montereali, M. A. Vincenti

Proceedings Volume 8677, 86770T (2013) https://doi.org/10.1117/12.2010400

KEYWORDS: Extreme ultraviolet, Laser induced fluorescence, Extreme ultraviolet lithography, Photomasks, Patents, Microscopes, Luminescence, Transistors, Ultraviolet radiation, Adhesives

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Proceedings Article | 22 April 2009 Paper

A laser-plasma clean soft x-ray source for projection microlithography

S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre

Proceedings Volume 7131, 713116 (2009) https://doi.org/10.1117/12.816912

KEYWORDS: Mirrors, Extreme ultraviolet, Photomasks, Projection lithography, Plasmas, Projection systems, X-ray sources, Krypton, Laser development, Optical filters

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Proceedings Article | 2 October 2007 Paper

Progress report on a 14.4-nm micro-exposure tool based on a laser-produced-plasma: debris mitigation system results and other issues

S. Bollanti, D. Amodio, A. Conti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre, C. Zheng, D. Garoli, M. Pelizzo, P. Nicolosi, V. Mattarello, V. Rigato, A. Gerardino

Proceedings Volume 6703, 670308 (2007) https://doi.org/10.1117/12.751442

KEYWORDS: Mirrors, Krypton, Argon, Extreme ultraviolet, Fluctuations and noise, Reflectivity, Plasma, Extreme ultraviolet lithography, Glasses, Copper

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Proceedings Article | 26 April 2007 Paper

Excimer-laser-driven EUV plasma source for one-shot one-pattern projection microlithography

P. Di Lazzaro, G. Altieri, D. Amodio, S. Bollanti, A. Conti, F. Flora, T. Letardi, L. Mezi, D. Murra, E. Tefouet Kana, A. Torre, C. E. Zheng

Proceedings Volume 6346, 63460M (2007) https://doi.org/10.1117/12.738084

KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Extreme ultraviolet lithography, Databases, Excimer lasers, X-rays, Pulsed laser operation, Photoresist materials, Prototyping

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Proceedings Article | 15 October 2005 Paper

Mask tilt effects counteracted by wafer tilts in a Schwarzschild objective based EUV lithography setup

S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre

Proceedings Volume 5962, 59622Y (2005) https://doi.org/10.1117/12.624845

KEYWORDS: Photomasks, Semiconducting wafers, Extreme ultraviolet lithography, Mirrors, Wafer-level optics, Zemax, Solids, Extreme ultraviolet, Image resolution, Microscopes

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Proceedings Article | 14 July 1998 Paper

Decomposition techniques of exponential operators and paraxial light optics

Giuseppe Dattoli, Amalia Torre

Proceedings Volume 3423, (1998) https://doi.org/10.1117/12.316574

KEYWORDS: Geometrical optics, Charged particle optics, Mechanics, Refractive index, Gaussian optics, Numerical integration, Particles, Analog electronics, Numerical analysis, Zirconium

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Proceedings Article | 17 December 1996 Paper

Unsupervised multiresolution segmentation and interpretation of textured SAR image

Guoqing Liu, ShunJi Huang, Amalia Torre, Franco Rubertone

Proceedings Volume 2955, (1996) https://doi.org/10.1117/12.262895

KEYWORDS: Image segmentation, Scattering, Synthetic aperture radar, Wavelets, Image resolution, Data modeling, Process modeling, Image processing algorithms and systems, Polarimetry, Spatial resolution

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Proceedings Article | 4 May 1993 Paper

Diffraction numerical simulation of a high-power excimer laser performance

Francesco Flora, M. Portaccio, Amalia Torre

Proceedings Volume 1810, (1993) https://doi.org/10.1117/12.144679

KEYWORDS: Resonators, Wave propagation, Numerical simulations, Excimer lasers, High power lasers, Aluminum, Diffraction, Laser resonators, Laser development, Mirrors

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Proceedings Article | 4 May 1993 Paper

Excimer laser development and applications at the ENEA Frascati Centre

Tommaso Letardi, Sarah Bollanti, Paolo Di Lazzaro, Honglie Fang, Francesco Flora, Shufen Fu, A. Gerardino, Gualtiero Giordano, Nicola Lisi, Luca Mezi, Giovanni Schina, Amalia Torre, Cheng En Zheng

Proceedings Volume 1810, (1993) https://doi.org/10.1117/12.144661

KEYWORDS: X-rays, Laser development, Excimer lasers, Electrodes, Pulsed laser operation, Chemical lasers, Diodes, Switching, Excimers, Lasers

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Showing 5 of 10 publications

SPIE Conference Volume | 14 July 1998

Second GR-I International Conference on New Laser Technologies and Applications

Conference Committee Involvement (1)

New Laser Technologies and Applications

1 June 1997 | Olympia, Greece

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