Dr. Alioune Diouf Profile

Dr. Alioune Diouf

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Publications (5)

Proceedings Article | 18 February 2010 Paper

Through-wafer interconnects for high degree of freedom MEMS deformable mirrors

Alioune Diouf, Thomas Bifano, Jason Stewart, Steven Cornelissen, Paul Bierden

Proceedings Volume 7595, 75950N (2010) https://doi.org/10.1117/12.842341

KEYWORDS: Actuators, Gold, Diffractive optical elements, Microelectromechanical systems, Packaging, Silicon, Deformable mirrors, Error analysis, Semiconducting wafers, Silicon carbide

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Proceedings Article | 18 February 2010 Paper

Open loop control on large stroke MEMS deformable mirrors

Alioune Diouf, Thomas Bifano, Andrew Legendre, Yang Lu, Jason Stewart

Proceedings Volume 7595, 75950D (2010) https://doi.org/10.1117/12.842489

KEYWORDS: Actuators, Mirrors, Calibration, Microelectromechanical systems, Deformable mirrors, Monochromatic aberrations, Wavefronts, Zernike polynomials, Space mirrors, Linear filtering

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SPIE Journal Paper | 1 July 2008 Open Access

Fabrication of implantable microshunt using a novel channel sealing technique

Alioune Diouf, Gregory Reimann, Thomas Bifano

JM3, Vol. 7, Issue 03, 030501, (July 2008) https://doi.org/10.1117/12.10.1117/1.2955935

KEYWORDS: Electroplating, Gold, Photoresist materials, Microfluidics, Fabrication, Photoresist processing, Microelectromechanical systems, Eye, Semiconducting wafers, Process control

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Proceedings Article | 8 February 2008 Paper

Precise open-loop control of MEMS deformable mirror shape

Thomas Bifano, Jason Stewart, Alioune Diouf

Proceedings Volume 6888, 68880P (2008) https://doi.org/10.1117/12.769492

KEYWORDS: Actuators, Mirrors, Fermium, Frequency modulation, Microelectromechanical systems, Deformable mirrors, Adaptive optics, Wavefronts, Calibration, Control systems

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Proceedings Article | 8 February 2008 Paper

Fabrication of single crystalline MEMS DM using anodic wafer bonding

Alioune Diouf, Mike Gingras, Jason Stewart, Thomas Bifano, Steven Cornelissen, Paul Bierden

Proceedings Volume 6888, 68880U (2008) https://doi.org/10.1117/12.763124

KEYWORDS: Semiconducting wafers, Actuators, Wafer bonding, Mirrors, Microelectromechanical systems, Glasses, Silicon, Etching, Electrodes, Sputter deposition

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