Dr. Albert Michaeli Profile

Dr. Albert Michaeli

Senior Process Engineer at Intel Corp

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Author

Publications (4)

Proceedings Article | 14 February 2007 Paper

Tailoring the response and temperature characteristics of multiple serial-coupled resonators in silicon on insulator

Branislav Timotijevic, David Thomson, Frederic Gardes, Simon Howe, Albert Michaeli, Jasna Crnjanski, Vittorio M. Passaro, Goran Mashanovich, Graham Reed, Desmond Ikuesan

Proceedings Volume 6477, 64770B (2007) https://doi.org/10.1117/12.700958

KEYWORDS: Waveguides, Resonators, Polarization, Directional couplers, Modeling, Silicon, Optical filters, Refractive index, Temperature metrology, Cladding

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Proceedings Article | 6 July 2006 Paper

Optical filters in silicon-on-insulator: design considerations for devices based upon strip and rib waveguides

Branislav Timotijevic, Graham Reed, Richard Jones, Ansheng Liu, Albert Michaeli, Goran Mashanovich

Proceedings Volume 6350, 63500K (2006) https://doi.org/10.1117/12.692903

KEYWORDS: Waveguides, Resonators, Polarization, Optical filters, Directional couplers, Silicon, Modeling, Wave propagation, Oxides, Cladding

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Proceedings Article | 25 October 2005 Paper

Photonic crystal fabrication on silicon-on-insulator (SOI) using 248nm and 193nm lithography

Michael Salib, Albert Michaeli, Adi Lazar, Haviv Bechor, Michael Settle, Thomas Krauss

Proceedings Volume 6017, 60170B (2005) https://doi.org/10.1117/12.630918

KEYWORDS: Silicon, Lithography, Photonic crystals, Waveguides, Etching, Optical proximity correction, Electron beam lithography, 193nm lithography, Optical fabrication, Oxidation

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Proceedings Article | 12 May 2005 Paper

Prediction of the lens lifetime by monitoring lens degradation on laser-based microlithography tools

Albert Michaeli, Eylon Rosner, Yehuda Root, Hagay Duenias, Shai Rubin

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.613278

KEYWORDS: Contamination, Absorption, Semiconducting wafers, Adsorption, Photomasks, Lithography, Pulsed laser operation, Image quality, Optical lithography, Software development

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