Determination of the phase in the center of a circular two-beam interference pattern to determine the displacement of a rough surface

Frans Meijer; Dawid Kucharski; Ewa Stachowska

doi:10.1117/1.OE.57.10.104101

1 October 2018 Determination of the phase in the center of a circular two-beam interference pattern to determine the displacement of a rough surface

Frans Meijer, Dawid Kucharski, Ewa Stachowska

Author Affiliations +

Funded by: Politechnika Poznańska (Poznań University of Technology)

Optical Engineering, Vol. 57, Issue 10, 104101 (October 2018). https://doi.org/10.1117/1.OE.57.10.104101

Abstract

We propose a fast algorithm to extract the phase in the center of an interferogram with circular fringes obtained in a simple Michelson interferometer setup with one rough surface. The phase in the center is a linear function of the displacement of an object, which is very advantageous. It avoids the uncertainty in displacement associated with intensity measurements near a maximum or minimum. Also the direction of movement is always clear. The method used also overcomes the problems associated with speckle, unavoidable with a rough surface, common in industrial applications, when using laser as a light source. Using a large number of points in the interferogram to obtain one value largely reduces noise and also increases the accuracy. Displacement is measured with an accuracy <10 nm.

Citation Download Citation

Frans Meijer, Dawid Kucharski, and Ewa Stachowska "Determination of the phase in the center of a circular two-beam interference pattern to determine the displacement of a rough surface," Optical Engineering 57(10), 104101 (1 October 2018). https://doi.org/10.1117/1.OE.57.10.104101

Received: 9 May 2018; Accepted: 7 August 2018; Published: 1 October 2018

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