Si-based infrared optical filters

Armandas Balčytis; Meguya Ryu; Gediminas Seniutinas; Yoshiaki Nishijima; Yuta Hikima; Massimiliano Zamengo; Raimondas Petruškevičius; Junko Morikawa; Saulius Juodkazis

doi:10.1117/1.OE.54.12.127103

14 December 2015 Si-based infrared optical filters

Armandas Balčytis, Meguya Ryu, Gediminas Seniutinas, Yoshiaki Nishijima, Yuta Hikima, Massimiliano Zamengo, Raimondas Petruškevičius, Junko Morikawa, Saulius Juodkazis

Author Affiliations +

Optical Engineering, Vol. 54, Issue 12, 127103 (December 2015). https://doi.org/10.1117/1.OE.54.12.127103

Abstract

Pyramidal silicon nanospikes, termed black-Si (b-Si), with controlled height of 0.2 to 1 μm, were fabricated by plasma etching over 3-in wafers and were shown to act as variable density filters in a wide range of the IR spectrum 2.5 to 20 μm, with transmission and its spectral gradient dependent on the height of the spikes. Such variable density IR filters can be utilized for imaging and monitoring applications. Narrow IR notch filters were realized with gold mesh arrays on Si wafers prospective for applications in surface-enhanced IR absorption sensing and “cold materials” for heat radiation into atmospheric IR transmission window. Both types of filters for IR: spectrally variable and notch are made by simple fabrication methods.

Citation Download Citation

Armandas Balčytis, Meguya Ryu, Gediminas Seniutinas, Yoshiaki Nishijima, Yuta Hikima, Massimiliano Zamengo, Raimondas Petruškevičius, Junko Morikawa, and Saulius Juodkazis "Si-based infrared optical filters," Optical Engineering 54(12), 127103 (14 December 2015). https://doi.org/10.1117/1.OE.54.12.127103

Published: 14 December 2015

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available