1 June 2007 Integration of precisely aligned lenslet arrays with waveguide arrays
Deqiang Song, Doug Jorgesen, Matthias Gross, Sadik C. Esener
Author Affiliations +
Abstract
We present a method to fabricate in situ lens arrays on the edge of waveguide arrays that are embedded in a printed circuit board. This fabrication method can guarantee precise alignment between the lenslet and the waveguide arrays, by directly overlaying the lenslet pattern on the waveguide cores. Each fabricated lenslet has a numerical aperture of 0.1, and the beam through it has a divergence angle of 3.29 deg, close to that of a perfectly aligned commercial lenslet array.
©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
Deqiang Song, Doug Jorgesen, Matthias Gross, and Sadik C. Esener "Integration of precisely aligned lenslet arrays with waveguide arrays," Optical Engineering 46(6), 065401 (1 June 2007). https://doi.org/10.1117/1.2743984
Published: 1 June 2007
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KEYWORDS
Waveguides

Optical alignment

Photomasks

Optical lithography

Glasses

Photoresist materials

Semiconducting wafers

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