1 September 2005 Integrated micro-optical multichip module based on an uncooled InGaAsSb/AlGaAsSb photodetector
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Abstract
This paper focuses on the integration of InGaAsSb photodetectors along with micro-optics in order to realize a prototype system that can achieve a stronger response during atmospheric profiling and spectroscopy measurements. The integration of the detector was executed using a novel conductive-adhesive-based flip-chip integration process. The design, fabrication, and integration of the constituent technologies and experimental results from their characterization are presented.
©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)
Saurabh K. Lohokare, Oleg V. Sulima, Thomas E. Dillon, and Dennis W. Prather "Integrated micro-optical multichip module based on an uncooled InGaAsSb/AlGaAsSb photodetector," Optical Engineering 44(9), 094401 (1 September 2005). https://doi.org/10.1117/1.2055370
Published: 1 September 2005
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KEYWORDS
Sensors

Diffractive optical elements

Indium gallium arsenide antimonide

Photodetectors

Glasses

Adhesives

Photoresist materials

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