Stitching interferometric measurement data for inspection of large optical components

Mikael Sjoedahl; Bozenko F. Oreb

doi:10.1117/1.1430727

1 February 2002 Stitching interferometric measurement data for inspection of large optical components

Mikael Sjoedahl, Bozenko F. Oreb

Optical Engineering, Vol. 41, Issue 2, (February 2002). https://doi.org/10.1117/1.1430727

An algorithm for stitching together a set of individual phase measurements into a unified larger phase map is presented. The set of individual phase maps results from scanning a component over the interferometer aperture and acquiring a measurement at each position. The algorithm is based on an iterative approach, where singular value decomposition is used to solve the rigid body movement problem between the different phase maps. The algorithm has been tested in numerical experiments and has been successfully applied to real data.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Mikael Sjoedahl and Bozenko F. Oreb "Stitching interferometric measurement data for inspection of large optical components," Optical Engineering 41(2), (1 February 2002). https://doi.org/10.1117/1.1430727

Published: 1 February 2002

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