Optical Monitoring Of Nonquarterwave Stacks

T. Skettrup

doi:10.1117/12.7974212

1 November 1987 Optical Monitoring Of Nonquarterwave Stacks

T. Skettrup

Author Affiliations +

Optical Engineering, Vol. 26, Issue 11, 261175 (November 1987). https://doi.org/10.1117/12.7974212

Abstract

Three methods of monitoring nonquarterwave stacks are investi-gated: the turning value method, the inflection point method, and the second-harmonic method. The advantages of these methods are that they are monochromatic and that they do not rely on any absolute measurements of transmittance during monitoring. Computer simulations of the deposition process are performed for different nonquarterwave stacks to check the accuracy of the three methods, and we investigate whether these methods can compensate for errors in thickness occurring during deposition.

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T. Skettrup "Optical Monitoring Of Nonquarterwave Stacks," Optical Engineering 26(11), 261175 (1 November 1987). https://doi.org/10.1117/12.7974212

Published: 1 November 1987

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