Ultra-short-pulsed laser-machined nanogratings of laser-induced periodic surface structures on thin molybdenum layers

Davide Scorticati; Gert-Willem R. B. E. Römer; Dirk Frederik de Lange; Bert Huis in 't Veld

doi:10.1117/1.JNP.6.063528

3 December 2012 Ultra-short-pulsed laser-machined nanogratings of laser-induced periodic surface structures on thin molybdenum layers

Davide Scorticati, Gert-Willem R. B. E. Römer, Dirk Frederik de Lange, Bert Huis in 't Veld

Author Affiliations +

Journal of Nanophotonics, Vol. 6, Issue 1, 063528 (December 2012). https://doi.org/10.1117/1.JNP.6.063528

Abstract

Large areas of regular diffraction nanogratings were produced consisting of so-called laser-induced periodic surface structures (LIPSS) on thin molybdenum layers ( < 400 nm) deposited on a borosilicate glass substrate. The aim was to produce these structures without ablating nor cracking the molybdenum layer. Ultra short laser pulses were applied using a focused Gaussian beam profile. Processing parameters such as laser fluence, pulse overlap, number of overscans, repetition frequency, wavelength and polarization were varied to study the effect on periodicity, height, and especially regularity of the obtained LIPSS. It was found that a careful choice of the correct laser parameters is required to avoid detrimental mechanical stresses, cracking, and delamination during the laser processing of the layer in order to remain in its correct range of ductility as well as to ensure regular LIPSS. A possible photovoltaic application of these nanogratings could be found in texturing of thin film cells to enhance light trapping mechanisms.

Citation Download Citation

Davide Scorticati, Gert-Willem R. B. E. Römer, Dirk Frederik de Lange, and Bert Huis in 't Veld "Ultra-short-pulsed laser-machined nanogratings of laser-induced periodic surface structures on thin molybdenum layers," Journal of Nanophotonics 6(1), 063528 (3 December 2012). https://doi.org/10.1117/1.JNP.6.063528

Published: 3 December 2012

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE