The Journey Continues

15 January 2021 The Journey Continues

Harry J. Levinson

Abstract

This editorial introduces readers to the newly titled JM³.

Citation Download Citation

Harry J. Levinson "The Journey Continues," Journal of Micro/Nanopatterning, Materials, and Metrology 20(1), 010101 (15 January 2021). https://doi.org/10.1117/1.JMM.20.1.010101

Published: 15 January 2021

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KEYWORDS

Optical lithography

Lithography

Semiconductors

Computational lithography

Electronics

Manufacturing

Metrology

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