Aluminum-coated silicon wafer bonding with tin intermediate layer

Zhiyuan Zhu; Min Yu; Dayu Tian; Yingwei Zhu; Peiquan Wang; Chenchen Liu; Weimin Wang; Min Miao; Jing Chen; Yufeng Jin

doi:10.1117/1.JMM.12.1.013012

11 February 2013 Aluminum-coated silicon wafer bonding with tin intermediate layer

Zhiyuan Zhu, Min Yu, Dayu Tian, Yingwei Zhu, Peiquan Wang, Chenchen Liu, Weimin Wang, Min Miao, Jing Chen, Yufeng Jin

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 1, 013012 (February 2013). https://doi.org/10.1117/1.JMM.12.1.013012

Abstract

Metallic wafer bonding is becoming a key enabling technology in microelectromechanical systems packaging and heterogeneous integration. We realize the bonding of silicon (Si) wafers coated with aluminum (Al) film with thin tin (Sn) film as the intermediate layer. The bonding pressure is 0.25 MPa. The bonding is achieved at temperatures as low as 280°C after a short bonding time of 3 min. The average bonding strength is 9.9 MPa. The minimum variation of bonding layer thickness is about 0.2 μm within a large area. A fracture surface study and a cross-section analysis are conducted and the bond mechanism is investigated. It is found that the fracture mainly occurs at Al/Sn interface during the shear test. Two bonding conditions are compared and the results show that applying bonding pressure before heating is important to achieve a uniform bonding layer.

Citation Download Citation

Zhiyuan Zhu, Min Yu, Dayu Tian, Yingwei Zhu, Peiquan Wang, Chenchen Liu, Weimin Wang, Min Miao, Jing Chen, and Yufeng Jin "Aluminum-coated silicon wafer bonding with tin intermediate layer," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(1), 013012 (11 February 2013). https://doi.org/10.1117/1.JMM.12.1.013012

Published: 11 February 2013

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available