Theoretical and experimental study of the photoelastic effect in channel waveguides in a diaphragm of LiNbO3

Maryam Ali Akbar Ganji; Reza Asadi

doi:10.1117/1.JMM.16.2.025502

1 June 2017 Theoretical and experimental study of the photoelastic effect in channel waveguides in a diaphragm of LiNbO₃

Maryam Ali Akbar Ganji, Reza Asadi

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 16, Issue 2, 025502 (June 2017). https://doi.org/10.1117/1.JMM.16.2.025502

Abstract

The ability of the photoelastic effect in optical waveguides fabricated by Ti diffusion in a diaphragm of LiNbO3 for using as a pressure sensor has been investigated. We have studied the polarization rotation and phase difference between TE and TM polarizations for the light transmitted from the waveguide that are induced by the external pressure. We have also studied the effect of position of the waveguides in the diaphragm on the pressure sensor’s sensitivity. The polishing technique has been used to reduce the thickness of the diaphragm to 0.2 mm in order to increase the sensor’s sensitivity to about Pπ=170 kPa, which is equivalent to the pressure required for inducing phase difference of π rad between the TE and TM polarizations.

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Maryam Ali Akbar Ganji and Reza Asadi "Theoretical and experimental study of the photoelastic effect in channel waveguides in a diaphragm of LiNbO₃," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(2), 025502 (1 June 2017). https://doi.org/10.1117/1.JMM.16.2.025502

Received: 21 February 2017; Accepted: 16 May 2017; Published: 1 June 2017

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