Design, simulation, and fabrication of a MEMS-based air amplifier for electrospray ionization

Petr Jurčíček; Helin Zou; Shuai Gao

doi:10.1117/1.JMM.12.2.023006

10 May 2013 Design, simulation, and fabrication of a MEMS-based air amplifier for electrospray ionization

Petr Jurčíček, Helin Zou, Shuai Gao

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 2, 023006 (May 2013). https://doi.org/10.1117/1.JMM.12.2.023006

Abstract

Recent developments in electrospray ionization mass spectrometry (ESI-MS) show that air amplifiers can be utilized to significantly enhance droplet desolvation and to focus gas-phase ions when provided between an electrospray (ES) source and the mass spectrometer (MS). However, these devices are bulky and expensive, which may be a factor prohibiting their broader utilization. We have developed a simple but effective method based on Bernoulli’s principle, the Coanda effect and MEMS processing to focus electrosprayed droplets and liberated gas-phase ions. We demonstrate a computer simulation and fabrication process for a micromachined air amplifier. The simulation results are used to optimize the geometry and to meet performance requirements. The optimized results then provide a design guideline for the device’s fabrication. The air amplifier is formed from two bonded polydimethylsiloxane (PDMS) casts. Each PDMS cast is fabricated through a molding process using a micromachined two-layer SU-8 mold. Experimental results show a 30-fold improvement in the ES current for certain operation conditions while the air amplifier is incorporated in the nano-electrospray ionization (nano-ESI) process. Compared with traditional air amplifiers, the micro-electro-mechanical systems (MEMS) based air amplifier provides good performance while keeping the fabrication process simple and cost effective.

Citation Download Citation

Petr Jurčíček, Helin Zou, and Shuai Gao "Design, simulation, and fabrication of a MEMS-based air amplifier for electrospray ionization," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(2), 023006 (10 May 2013). https://doi.org/10.1117/1.JMM.12.2.023006

Published: 10 May 2013

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