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13 March 2012 Errata: MOEMS deformable mirrors for focus control in vital microscopy
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Abstract
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This article [J. Micro/Nanolith. MEMS MOEMS 10, 023005 (2011)] was originally published online on 28 April 2011 with errors in Table 1. The correct data appear below.

Table 1

Zernike polynomials associated with terms 1 to 15 in the Zernike mode spectrum.

Term No.n, m for ZnmPolynomialpk-pk amplitudeAberration type
10,01piston
21,1rcos(θ)1tilt about y-axis
31,1rsin(θ)1tilt about x-axis
42,2r2cos(2θ)1astigmatism
52,02r212defocus
62,2r3sin(2θ)1astigmatism
73,3r3cos(3θ)1trefoil
83,1(3r32r)cos(θ)1.63coma
93,1(3r32r)sin(θ)1.63coma
103,3r3sin(3θ)1trefoil
114,4r4cos(4θ)1quadrafoil
124,2(4r33r2)cos(2θ)1.562nd astigmatism
134,06r46r2+11.5spherical
144,2(4r33r2)sin(2θ)1.562nd astigmatism
154,4r4sin(4θ)1quadrafoil

The online version of the article was corrected on 12 January 2012.

© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2012/$25.00 © 2012 SPIE
Mohammad J. Moghimi, B. Jeffrey Lutzenberger, David L. Dickensheets, and Brant M. Kaylor "Errata: MOEMS deformable mirrors for focus control in vital microscopy," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(1), 019801 (13 March 2012). https://doi.org/10.1117/1.JMM.11.1.019801
Published: 13 March 2012
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KEYWORDS
Monochromatic aberrations

Deformable mirrors

Microopto electromechanical systems

Microscopy

Computer engineering

Photonics

Spherical lenses

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