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22 March 2012 Fabrication of functional silicon-based nanoporous membranes
Nazar Ileri, Pieter Stroeve, Ahmet Palazoglu, Roland Faller, Hoang T. Nguyen, Jerald A. Britten, Sonia E. Letant, Joseph W. Tringe, Saleem H. Zaidi
Author Affiliations +
Funded by: University of California System wide Biotechnology Research & Education Training Program, US Department of Energy, National Nuclear Security Administration, U.S. Department of Energy (DOE), Lawrence Livermore Nat. Lab., U.S. Department of Energy by Lawrence Livermore National Laboratory, Lawrence Livermore National Laboratory, U.S. Department of Energy
Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 1, 013012 (March 2012). https://doi.org/10.1117/1.JMM.11.1.013012
Abstract
Macroscopic porous membranes with pore diameter uniformity approaching the nanometer scale have great potential to significantly increase the speed, selectivity, and efficiency of molecular separations. We present fabrication, characterization, and molecular transport evaluation of nanoporous thin silicon-based sieves created by laser interferometric lithography (LIL). This fabrication approach is ideally suited for the integration of nanostructured pore arrays into larger microfluidic processing systems, using a simple all-silicon lithographic process. Submilli-meter-scale planar arrays of uniform cylindrical and pyramidal nanopores are created in silicon nitride and silicon, respectively, with average pore diameters below 250 nm and significantly smaller standard error than commercial polycarbonate track etched (PCTE) membranes. Molecular transport properties of short cylindrical pores fabricated by LIL are compared to those of thicker commercial PCTE membranes for the first time. A 10-fold increase in pyridine pore flux is achieved with thin membranes relative to commercial sieves, without any modification of the membrane surface.
© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2012/$25.00 © 2012 SPIE
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Nazar Ileri, Pieter Stroeve, Ahmet Palazoglu, Roland Faller, Hoang T. Nguyen, Jerald A. Britten, Sonia E. Letant, Joseph W. Tringe, and Saleem H. Zaidi "Fabrication of functional silicon-based nanoporous membranes," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(1), 013012 (22 March 2012). https://doi.org/10.1117/1.JMM.11.1.013012
Published: 22 March 2012
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KEYWORDS
Silicon
Etching
Semiconducting wafers
Diffusion
Lithography
Scanning electron microscopy
Manufacturing
CHORUS Article. This article was made freely available starting 22 March 2013
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