Controllable fabrication of enclosed micro/nanochannels via polymethyl methacrylate pattern as sacrificial template and capillary effect

Yunqiao Wu; Jun Zhou; Edwin Y. Pun

doi:10.1117/1.3665215

1 October 2011 Controllable fabrication of enclosed micro/nanochannels via polymethyl methacrylate pattern as sacrificial template and capillary effect

Yunqiao Wu, Jun Zhou, Edwin Y. Pun

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 10, Issue 4, 049701 (October 2011). https://doi.org/10.1117/1.3665215

Abstract

High quality rectangular micro- to nanochannels with SiO2 shells have been fabricated by using optimized preparation parameters. Various dimensions of cross section of channels have been effectively controlled via the polymethyl methacrylate template as a suitable sacrificial layer in the processes of pattern formation and nanolithography. And, the fabricated channels have excellent shape uniformity, smooth inner surface, and vertical sidewalls along the longitudinal axis, which is confirmed by the good agreement between the experimental data and theoretical values of the mean filling speeds of liquids in the confined space. This technique exhibits the potential advantage for the controllable fabrication of various micro- to nanofluidic devices.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Yunqiao Wu, Jun Zhou, and Edwin Y. Pun "Controllable fabrication of enclosed micro/nanochannels via polymethyl methacrylate pattern as sacrificial template and capillary effect," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(4), 049701 (1 October 2011). https://doi.org/10.1117/1.3665215

Published: 1 October 2011

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