Physical-optics modeling and design of curved surfaces

Frank Wyrowski; Christian Hellmann

doi:10.1117/12.3023304

18 June 2024 Physical-optics modeling and design of curved surfaces

Frank Wyrowski, Christian Hellmann

Author Affiliations +

Proceedings Volume PC13023, Computational Optics 2024; PC130230E (2024) https://doi.org/10.1117/12.3023304
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

The modeling of the propagation of light through curved smooth surfaces constitutes the backbone of optical system modeling. The Local Plane Interface Approximation (LPIA) has been suggested for this task and shows excellent accuracy and simulation speed. It assumes a local plane wave and a local plane interface and applies the S matrix solution for stratified media locally. As a physical-optics generalization of ray optics the LPIA technique has been formulated in the space domain. We show that it must be applied in the k-domain to genuinely include effects like the Goos Hänchen shift and, more importantly, lateral shifts due to transmission and reflection at smooth surfaces with coatings. Such shifts lead to small aberrations, which must be included in high-accuracy optical system modeling, e.g., in lithography.

Conference Presentation

Citation Download Citation

Frank Wyrowski and Christian Hellmann "Physical-optics modeling and design of curved surfaces", Proc. SPIE PC13023, Computational Optics 2024, PC130230E (18 June 2024); https://doi.org/10.1117/12.3023304

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