A metalens-based focus variation instrument exploiting focal plane scanning via illumination wavelength

Pengqian Yang; Haydn Martin; Andrew Henning; Xiangqian Jiang

doi:10.1117/12.3017153

11 June 2024 A metalens-based focus variation instrument exploiting focal plane scanning via illumination wavelength

Pengqian Yang, Haydn Martin, Andrew Henning, Xiangqian Jiang

Proceedings Volume PC12990, Metamaterials XIV; PC129900L (2024) https://doi.org/10.1117/12.3017153
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

Here we present a focus variation microscope without moving parts, utilizing the chromatic aberration characteristic of the single-surface metalens. By varying the illumination wavelength filtered through an acousto-optic tuneable filter, scanning of the focal plane can be realised. Imaging is achieved using basic hyperbolic metalens composed of pillars etched from GaN on an Al_2 O_3 substrate. Varying the illumination wavelength from 650 nm to 670 nm shifts the focal plane by 75μm, allowing for capturing the required image stack. Depth information can be extracted by a focus detection algorithm, and the surface topography can be reconstructed. The compact design of this device allows for its use in spaces where traditional instruments cannot fit. We will demonstrate the results from our initial device, including the successful measurement of a stepped artefact, and discuss improvements, such as designing complex multi-element chromatic metalens with enhancing off-axis imaging.

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Citation Download Citation

Pengqian Yang, Haydn Martin, Andrew Henning, and Xiangqian Jiang "A metalens-based focus variation instrument exploiting focal plane scanning via illumination wavelength", Proc. SPIE PC12990, Metamaterials XIV, PC129900L (11 June 2024); https://doi.org/10.1117/12.3017153

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KEYWORDS

Equipment

Light sources and illumination

Detection and tracking algorithms

Gallium nitride

Light sources

Materials properties

Microscopes

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