Sustainable semiconductor processing solutions: status and guidelines

Andrea Firrincieli; Emily Gallagher; Herbert Struyf; Frank Holsteyns; Cedric Rolin; Lars-Åke Ragnarsson

doi:10.1117/12.3012691

10 April 2024 Sustainable semiconductor processing solutions: status and guidelines

Andrea Firrincieli, Emily Gallagher, Herbert Struyf, Frank Holsteyns, Cedric Rolin, Lars-Åke Ragnarsson

Author Affiliations +

Proceedings Volume PC12958, Advanced Etch Technology and Process Integration for Nanopatterning XIII; (2024) https://doi.org/10.1117/12.3012691
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Abstract

Environmental sustainability is at the core of many recent studies, offering research opportunities to help meet the ambitious net-zero commitments defined by semiconductor companies. In this context, it is important to analyze the sustainability challenges that different process areas are facing. To enable process engineers to develop sustainable solutions, new metrics, suitable tools and clear targets need to be provided. In this paper we analyze how such tools should be crafted to help the definition of sustainable practices for semiconductors processing.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Andrea Firrincieli, Emily Gallagher, Herbert Struyf, Frank Holsteyns, Cedric Rolin, and Lars-Åke Ragnarsson "Sustainable semiconductor processing solutions: status and guidelines", Proc. SPIE PC12958, Advanced Etch Technology and Process Integration for Nanopatterning XIII, (10 April 2024); https://doi.org/10.1117/12.3012691

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