Measurement of tin diffusion coefficients through molecular hydrogen

Gordon Jameson Crouse; Andrew Herschberg; Nathan Bartlett; Niels Braaksma; David Ruzic

doi:10.1117/12.3013100

10 April 2024 Measurement of tin diffusion coefficients through molecular hydrogen

Gordon Jameson Crouse, Andrew Herschberg, Nathan Bartlett, Niels Braaksma, David Ruzic

Proceedings Volume PC12953, Optical and EUV Nanolithography XXXVII; PC1295312 (2024) https://doi.org/10.1117/12.3013100
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

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Abstract

Extreme ultraviolet (EUV) lithography sources use large amounts of tin to create ultraviolet light. Accurate modeling of neutral tin transport relies on knowledge of the diffusion coefficients of neutral tin through molecular hydrogen. This work experimentally determined the diffusion coefficients of tin through molecular hydrogen vapour at different tin temperatures and ambient pressures. A known amount of tin is evaporated into a pipe with a known flow profile at a known ambient pressure. Deposited tin is measured downstream of the pipe with a quartz-crystal microbalance (QCM). A variety of analytical and numerical coefficients were then compared in order to find the diffusion coefficient.

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Gordon Jameson Crouse, Andrew Herschberg, Nathan Bartlett, Niels Braaksma, and David Ruzic "Measurement of tin diffusion coefficients through molecular hydrogen", Proc. SPIE PC12953, Optical and EUV Nanolithography XXXVII, PC1295312 (10 April 2024); https://doi.org/10.1117/12.3013100

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