Cutting-edge single wafer MOCVD technology enabling advanced nitride applications with high performance

Soo Min Lee; Bumjoon Kim; Randhir Bubber; Ming Pan; Michael Coco; Rudy Parekh; Drew Hanser

doi:10.1117/12.3003504

13 March 2024 Cutting-edge single wafer MOCVD technology enabling advanced nitride applications with high performance

Soo Min Lee, Bumjoon Kim, Randhir Bubber, Ming Pan, Michael Coco, Rudy Parekh, Drew Hanser

Author Affiliations +

Proceedings Volume PC12906, Light-Emitting Devices, Materials, and Applications XXVIII; PC1290604 (2024) https://doi.org/10.1117/12.3003504
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

MOCVD technology has widely grown compound semiconductors for various applications, like Power/RF GaN and micro-LEDs. Precise control of wafer uniformity, defect density, and run-to-run consistency is essential for optimal results and reducing COO. High-speed rotation vertical reactors, with uniform deposition capabilities, enable a wide process window. Implementing these in a single wafer configuration enhances film uniformity through concentric temperature and flow patterns. The Propel® MOCVD 300mm single wafer reactor made 300mm semiconductor fabrication accessible to the nitride material system, critical for RF and micro-LEDs. This presentation covers latest Propel® 300mm MOCVD single wafer reactor advancements, including uniformity, repeatability, crystal quality for GaN/Si, GaN HEMT structure characterization, and GaN on Si LED wavelength uniformity. We'll discuss recent progress in red InGaN LED performance on 6” sapphire and 8” Si wafers, highlighting how Propel® MOCVD enhances high indium composition materials with Turbodisc® single wafer reactor technology.

Conference Presentation

Citation Download Citation

Soo Min Lee, Bumjoon Kim, Randhir Bubber, Ming Pan, Michael Coco, Rudy Parekh, and Drew Hanser "Cutting-edge single wafer MOCVD technology enabling advanced nitride applications with high performance", Proc. SPIE PC12906, Light-Emitting Devices, Materials, and Applications XXVIII, PC1290604 (13 March 2024); https://doi.org/10.1117/12.3003504

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