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23 August 2023 Advanced in situ metrology for large aperture flat mirrors
Erhui Qi, Haixiang Hu, Xiao Luo, Zhenyu Liu
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Proceedings Volume PC12619, Modeling Aspects in Optical Metrology IX; PC1261904 (2023) https://doi.org/10.1117/12.2673949
Event: SPIE Optical Metrology, 2023, Munich, Germany
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Erhui Qi, Haixiang Hu, Xiao Luo, and Zhenyu Liu "Advanced in situ metrology for large aperture flat mirrors", Proc. SPIE PC12619, Modeling Aspects in Optical Metrology IX, PC1261904 (23 August 2023); https://doi.org/10.1117/12.2673949
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KEYWORDS
Mirrors
Metrology
Manufacturing
Mirror surfaces
Surface finishing
Polishing
Testing and analysis
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