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8 June 2023 Recent advances in the development and application of laser plasma X-ray and extreme ultraviolet (EUV) sources based on a gas puff target
Henryk Fiedorowicz
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Proceedings Volume PC12582, Compact Radiation Sources from EUV to Gamma-rays: Development and Applications; PC125820H (2023) https://doi.org/10.1117/12.2666619
Event: SPIE Optics + Optoelectronics, 2023, Prague, Czech Republic
Abstract
The recent advances in the development and application of laser plasma sources of X-rays and extreme ultraviolet (EUV) based on a double-stream gas puff target are presented. The targets are formed by a system of two solenoid gas valves equipped with a double nozzle setup. Soft X-ray and EUV radiation is emitted from the plasma created by irradiating the gas puff target with a nanosecond laser pulse from the Nd:YAG laser. The results of recent work on the improvement of source parameters and their use in absorption spectroscopy, coherence tomography and plasma studies are presented.
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Henryk Fiedorowicz "Recent advances in the development and application of laser plasma X-ray and extreme ultraviolet (EUV) sources based on a gas puff target", Proc. SPIE PC12582, Compact Radiation Sources from EUV to Gamma-rays: Development and Applications, PC125820H (8 June 2023); https://doi.org/10.1117/12.2666619
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KEYWORDS
Extreme ultraviolet
Plasma
X-rays
X-ray lasers
Optical coherence tomography
Radiography
Technology
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