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7 June 2023 Assembly of an ultralight weight X-ray telescope using MEMS technologies (Conference Presentation)
Hiromi Morishita, Yuichiro Ezoe, Kumi Ishikawa, Masaki Numazawa, Daiki Ishi, Aoto Fukushima, Ayata Inagaki, Yoko Ueda, Luna Sekiguchi, Yukine Tsuji, Takatoshi Murakawa, Kazuma Yamaguchi, Rei Ishikawa, Daiki Morimoto, Yudai Yamada, Kazuhisa Mitsuda, Kohei Morishita, Kazuo Nakajima, Yoshiaki Kanamori
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Proceedings Volume PC12576, EUV and X-ray Optics: Synergy between Laboratory and Space VIII; PC1257602 (2023) https://doi.org/10.1117/12.2665160
Event: SPIE Optics + Optoelectronics, 2023, Prague, Czech Republic
Abstract
We have been developing an ultra-lightweight Wolter type-I X-ray telescope fabricated with micro electro mechanical systems (MEMS) technologies for GEO-X (GEOspace X-ray Imager) mission. GEO-X will aim global imaging of the Earth's magnetosphere using X-rays. The telescope is our original micropore optics which is light in weight (~5 g), compact with a short focal length (~250 mm), and has a wide field-of-view (~5 deg x 5 deg). In this talk we show developed assembly processes to meet the requirements of the GEO-X mission and the telescope's X-ray imaging performance as an engineering model with this method.
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© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Hiromi Morishita, Yuichiro Ezoe, Kumi Ishikawa, Masaki Numazawa, Daiki Ishi, Aoto Fukushima, Ayata Inagaki, Yoko Ueda, Luna Sekiguchi, Yukine Tsuji, Takatoshi Murakawa, Kazuma Yamaguchi, Rei Ishikawa, Daiki Morimoto, Yudai Yamada, Kazuhisa Mitsuda, Kohei Morishita, Kazuo Nakajima, and Yoshiaki Kanamori "Assembly of an ultralight weight X-ray telescope using MEMS technologies (Conference Presentation)", Proc. SPIE PC12576, EUV and X-ray Optics: Synergy between Laboratory and Space VIII, PC1257602 (7 June 2023); https://doi.org/10.1117/12.2665160
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KEYWORDS
X-ray telescopes
Microelectromechanical systems
X-rays
Optical fabrication
Semiconducting wafers
Silicon
Wafer-level optics
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