Fs pulse laser-based, micro LED chips transfer technology

Seungman Kim; Seongheum Han; Jae Seung Lim; Sumin Kang; Seunghwoi Han; Jae-Hak Lee; Ah-Young Park; Jun-Yeob Song

doi:10.1117/12.2648046

27 March 2023 Fs pulse laser-based, micro LED chips transfer technology

Seungman Kim, Seongheum Han, Jae Seung Lim, Sumin Kang, Seunghwoi Han, Jae-Hak Lee, Ah-Young Park, Jun-Yeob Song

Proceedings Volume PC12443, Advances in Display Technologies XIII; PC124430B (2023) https://doi.org/10.1117/12.2648046
Event: SPIE OPTO, 2023, San Francisco, California, United States

Conference Poster

Abstract

In this study, we developed a femtosecond pulse laser-based micro LED transfer process and optical system technology that precisely transfers micro LED chips with a size of several tens of micrometers. In order to realize the high-speed and precision transfer process of the micro LED chip, the femtosecond pulse laser was applied as a light source for the transfer process. In addition, dynamic release layer was applied to transfer micro LED chips at high speed without direct damages by laser. we analyzed the tendency of chip transfer process by adjusting the parameters for laser irradiation properties and material properties.

Citation Download Citation

Seungman Kim, Seongheum Han, Jae Seung Lim, Sumin Kang, Seunghwoi Han, Jae-Hak Lee, Ah-Young Park, and Jun-Yeob Song "Fs pulse laser-based, micro LED chips transfer technology", Proc. SPIE PC12443, Advances in Display Technologies XIII, PC124430B (27 March 2023); https://doi.org/10.1117/12.2648046

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