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3 October 2022 Increasing resolution of X-ray imaging at high acceleration voltages (Conference Presentation)
Emil Espes, Anasuya Adibhatla, Till Dreier
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Proceedings Volume PC12240, Advances in X-Ray/EUV Optics and Components XVII; PC1224003 (2022) https://doi.org/10.1117/12.2633060
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States
Abstract
Driven by needs from scientific research, healthcare and industrial manufacturing, X-ray microscopy has been successfully transferred from synchrotrons to the laboratory and the spatial resolution has been pushed to sub-micrometer. One way to further improve the resolution is to use an X-ray source with a very small focal spot. At Excillum, based on advanced electron beam and target technologies, a state-of-art nanofocus x-ray tube has been developed which enables an isotropic, resolution of 150 nm line-spacing all the way up to 160 kV of acceleration voltage.
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Emil Espes, Anasuya Adibhatla, and Till Dreier "Increasing resolution of X-ray imaging at high acceleration voltages (Conference Presentation)", Proc. SPIE PC12240, Advances in X-Ray/EUV Optics and Components XVII, PC1224003 (3 October 2022); https://doi.org/10.1117/12.2633060
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KEYWORDS
Image resolution
X-ray imaging
X-rays
Scientific research
Spatial resolution
Synchrotrons
X-ray microscopy
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