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30 May 2022 A silicon oxynitride platform for linear and nonlinear NIR photonics
Gioele Piccoli, Matteo Sanna, Massimo Borghi, Lorenzo Pavesi, Mher Ghulinyan
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Proceedings Volume PC12148, Integrated Photonics Platforms II; PC1214803 (2022) https://doi.org/10.1117/12.2620679
Event: SPIE Photonics Europe, 2022, Strasbourg, France
Abstract
We present a novel, low loss, integrated photonic platform based on silicon oxynitride (SiON) channel waveguides, capable to manage a wide range of VIS-NIR wavelengths for both linear and nonlinear optics applications. The proposed platform shows promising properties for a wide range of applications in on-chip sensing, LIDAR and integrated quantum photonic technologies. The propagation losses of the realized waveguides, characterized in a linear regime, are below 1.8 dB/cm at a wavelength of 800nm. The nonlinear optical properties of the platform have been characterized, in the wavelength range from 740nm to 840nm, by studying the broadening of picosecond laser pulses in Self-Phase-Modulation process. The resulting nonlinear coefficient n2 varies between 6 and 14 x 10^(-20) m^2/W within the studied spectral range, showing a clear increasing trend while approaching the half value of the silicon oxynitride band gap (Eg~4eV).
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Gioele Piccoli, Matteo Sanna, Massimo Borghi, Lorenzo Pavesi, and Mher Ghulinyan "A silicon oxynitride platform for linear and nonlinear NIR photonics", Proc. SPIE PC12148, Integrated Photonics Platforms II, PC1214803 (30 May 2022); https://doi.org/10.1117/12.2620679
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KEYWORDS
Silicon
Photonics
Waveguides
Near infrared
Silicon photonics
Cladding
Integrated photonics
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