Integrating optopiezoelectric actuators and a two-mode excited linear ultrasonic motor for microfluidics

Tsun-Hsu Chen; Hsin-Hu Wang; Yu-Hsiang Hsu; Chih-Kung Lee

doi:10.1117/12.2211944

21 March 2016 Integrating optopiezoelectric actuators and a two-mode excited linear ultrasonic motor for microfluidics

Tsun-Hsu Chen, Hsin-Hu Wang, Yu-Hsiang Hsu, Chih-Kung Lee

Proceedings Volume 9705, Microfluidics, BioMEMS, and Medical Microsystems XIV; 97050Q (2016) https://doi.org/10.1117/12.2211944
Event: SPIE BiOS, 2016, San Francisco, California, United States

Abstract

In comparison to more developed optical method for microparticle manipulation like optical tweezers, an optopiezoelectric actuating system could provide force output that is several orders higher. Taking advantages of photoconductive materials, the concept of integrating a virtual electrode in a distributed opto-piezoelectric actuators was developed for real-time in-situ spatial tailoring for vast varieties of applications in biochips, smart structures, etc. In this study, photoconductive material titanium oxide phthalocyanine (TiOPc) was used as the active ingredient to enable the virtual electrode in an opto-piezoelectric material based distributed actuator. By illuminating light of proper wavelength and enough intensity onto TiOPc photoconductive material, the effective impedance of the illuminated portion of TiOPc could drop significantly. The contributions of using additives in the TiOPc photoconductive electrode to adjust the electrical properties was investigated for optimization. Further, the two-mode excited linear ultrasonic motor was also studied and the feasibility to integrate the TiOPc photoconductive electrode was discussed. The flexibility provided by this newly developed system could potential deliver versatile performance in biochip applications.

Conference Presentation

Citation Download Citation

Tsun-Hsu Chen, Hsin-Hu Wang, Yu-Hsiang Hsu, and Chih-Kung Lee "Integrating optopiezoelectric actuators and a two-mode excited linear ultrasonic motor for microfluidics", Proc. SPIE 9705, Microfluidics, BioMEMS, and Medical Microsystems XIV, 97050Q (21 March 2016); https://doi.org/10.1117/12.2211944

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