Optical frequency comb profilometry for large volume metrology

Yoshio Hayasaki; Quang Duc Pham

doi:10.1117/12.2187287

29 July 2015 Optical frequency comb profilometry for large volume metrology

Yoshio Hayasaki, Quang Duc Pham

Proceedings Volume 9659, International Conference on Photonics Solutions 2015; 965904 (2015) https://doi.org/10.1117/12.2187287
Event: International Conference on Photonics Solutions 2015, 2015, Hua Hin, Thailand

Abstract

An optical profilometer composed of an optical frequency comb source, a single pixel camera, and an optoelectronic interferometer in radio frequecny range have been developed toward large volume metrology. The optical profilometer allows us to measure an object with a large depth much more than a light wavelength without any 2π phase ambiguity. The wide dynamic range is achieved with high stability of the optical frequency comb and the simultaneous multi-singlefrequency operation. The single pixel camera is used for two-dimensional imaging without a mechanical scanning and the compressive sensing technique reduces the number of measurements. A surface profilometry for an object with a depth of several centimeters to a meter is demonstrated.

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Yoshio Hayasaki and Quang Duc Pham "Optical frequency comb profilometry for large volume metrology", Proc. SPIE 9659, International Conference on Photonics Solutions 2015, 965904 (29 July 2015); https://doi.org/10.1117/12.2187287

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KEYWORDS

Frequency combs

Radio optics

Cameras

Metrology

Digital micromirror devices

Photodetectors

Distance measurement

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