Pulsed UV and ultrafast laser micromachining of surface structures

Paul Apte; Neil Sykes

doi:10.1117/12.2182418

1 July 2015 Pulsed UV and ultrafast laser micromachining of surface structures

Paul Apte, Neil Sykes

Author Affiliations +

Proceedings Volume 9657, Industrial Laser Applications Symposium (ILAS 2015); 96570D (2015) https://doi.org/10.1117/12.2182418
Event: Industrial Laser Applications Symposium 2015, 2015, Kenilworth, United Kingdom

Abstract

We describe and compare the cutting and patterning of various “difficult” materials using pulsed UV Excimer, picosecond and femtosecond laser sources. Beam delivery using both fast galvanometer scanners and scanning mask imaging are described. Each laser source has its own particular strengths and weaknesses, and the optimum choice for an application is also decided by financial constraints. With some materials notable improvements in process quality have been observed using femtosecond lasers compared to picosecond lasers, which makes for an interesting choice now that cost effective reliable femtosecond systems are increasingly available. By contrast Pulsed UV Excimer lasers offer different imaging characteristics similar to mask based Lithographic systems and are particularly suited to the processing of polymers. We discuss optimized beam delivery techniques for these lasers.

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Paul Apte and Neil Sykes "Pulsed UV and ultrafast laser micromachining of surface structures", Proc. SPIE 9657, Industrial Laser Applications Symposium (ILAS 2015), 96570D (1 July 2015); https://doi.org/10.1117/12.2182418

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