Multifunctional thin film sensor system as monitoring system in production

Saskia Biehl; Christian Rumposch; Nancy Paetsch

doi:10.1117/12.2178914

21 May 2015 Multifunctional thin film sensor system as monitoring system in production

Saskia Biehl, Christian Rumposch, Nancy Paetsch

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95170Y (2015) https://doi.org/10.1117/12.2178914
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

The two most important measurement categories in production are temperature and load. Therefore commercial sensors are applied in machinery as near as possible to the working parts. For a cost efficient production the integration of sensor elements directly on top of the surface in the heavily loaded regions is essential to get the real temperature and load distributions during the production process. Therefore a new multifunctional thin film sensor system is in development. This multilayer system combines thermoresistive sensor structures with piezoresistive ones and exists out of wear resistant carbon based layers [1, 2, 3, 4, 5]. The sensor data will lead to a deeper process understanding, to optimization of simulation tools, to reduction of rejects and to an improvement of flexibility in production.

Citation Download Citation

Saskia Biehl, Christian Rumposch, and Nancy Paetsch "Multifunctional thin film sensor system as monitoring system in production", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170Y (21 May 2015); https://doi.org/10.1117/12.2178914

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