Fundamental study of spin-coating using in-situ analysis and simulation

Masahiko Harumoto; Jun-ichi Yoshida; Harold Stokes; Yuji Tanaka; Tadashi Miyagi; Koji Kaneyama; Charles Pieczulewski; Masaya Asai

doi:10.1117/12.2085277

20 March 2015 Fundamental study of spin-coating using in-situ analysis and simulation

Masahiko Harumoto, Jun-ichi Yoshida, Harold Stokes, Yuji Tanaka, Tadashi Miyagi, Koji Kaneyama, Charles Pieczulewski, Masaya Asai

Author Affiliations +

Proceedings Volume 9425, Advances in Patterning Materials and Processes XXXII; 94250G (2015) https://doi.org/10.1117/12.2085277
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

Spin coating has been used as a photoresist application method for many years, and consequently certain defects have been recognized through each resist generation; i-line, KrF, ArF, ArF immersion and, most recently, EUV. Last year we reported an in-situ analysis via high-speed video camera that proved to be useful for understanding defect formation such as non-uniformity spots within organic film coatings and post-develop water-mark defects. In this study, fingerprints known as ‘tiger stripes’ around the wafer’s edge were analyzed. This phenomenon, for example, is directly related to the wafer spin-speed and air-flow during the coat-processing. Utilizing a high-speed camera and 3D simulation, we reveal the mechanism of fingerprint generation for tiger stripe phenomena, confirm the mechanism with several different spin-speeds, and correlate these to defect inspection results. Furthermore, we will discuss the expansion to 450mmm wafers.

Citation Download Citation

Masahiko Harumoto, Jun-ichi Yoshida, Harold Stokes, Yuji Tanaka, Tadashi Miyagi, Koji Kaneyama, Charles Pieczulewski, and Masaya Asai "Fundamental study of spin-coating using in-situ analysis and simulation", Proc. SPIE 9425, Advances in Patterning Materials and Processes XXXII, 94250G (20 March 2015); https://doi.org/10.1117/12.2085277

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available