In particular, a simple and highly versatile synthesis platform enabling preparation of HyMat is presented, which is built up by a bottom-up sol-gel approach at low processing temperatures. A few types of key building blocks pave the way for accessing HyMat and make up their formulation, providing a means to synthesize innovative materials enabling to get: - optically active micro and nanostructures; - miniaturized sensors for analytes in gaseous or liquid media; - direct patternability with a range of lithographic techniques; - variable inorganic and organic compositions, and controlled porosity. Examples of micro and nanostructures based on these spin-on materials with ceramic (i.e. SiO2, GeO2, Al2O3, ZrO2, TiO2,) and hybrid compositions will be presented for different applications including plasmonic or fluorescent sensors, dry-etching masks with outstanding resistance, optically active micro and nanostructured platforms and high resolution patterns. |
ACCESS THE FULL ARTICLE
No SPIE Account? Create one
CITATIONS
Cited by 1 scholarly publication.
Lithography
Sol-gels
Photomasks
Resistance
Silicon
Scanning electron microscopy
Active optics