Active angular alignment of gauge block in system for contactless gauge block calibration

Zdeněk Buchta; Martin Šarbort; Šimon Řeřucha; Václav Hucl; Martin Čížek; Josef Lazar; Ondřej Číp

doi:10.1117/12.2052901

1 May 2014 Active angular alignment of gauge block in system for contactless gauge block calibration

Zdeněk Buchta, Martin Šarbort, Šimon Řeřucha, Václav Hucl, Martin Čížek, Josef Lazar, Ondřej Číp

Author Affiliations +

Proceedings Volume 9132, Optical Micro- and Nanometrology V; 91321J (2014) https://doi.org/10.1117/12.2052901
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

This paper presents a method for active angular alignment of gauge block implemented in a system for automatic contactless calibration of gauge blocks designed at ISI ASCR. The system combines low-coherence interferometry and laser interferometry, where the first identifies the gauge block sides position and the second one measures the gauge block length itself. A crucial part of the system is the algorithm for gauge block alignment to the measuring beam which is able to compensate the gauge block lateral and longitudinal tilt up to 0.141 mrad. The algorithm is also important for the gauge block position monitoring during its length measurement.

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Zdeněk Buchta, Martin Šarbort, Šimon Řeřucha, Václav Hucl, Martin Čížek, Josef Lazar, and Ondřej Číp "Active angular alignment of gauge block in system for contactless gauge block calibration", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 91321J (1 May 2014); https://doi.org/10.1117/12.2052901

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