A 1024×1 linear photodiode array sensor with fast readout speed flexible pixel-level integration time and high stability to UV light exposure

Takahiro Akutsu; Shun Kawada; Yasumasa Koda; Taiki Nakazawa; Rihito Kuroda; Shigetoshi Sugawa

doi:10.1117/12.2040764

4 March 2014 A 1024×1 linear photodiode array sensor with fast readout speed flexible pixel-level integration time and high stability to UV light exposure

Takahiro Akutsu, Shun Kawada, Yasumasa Koda, Taiki Nakazawa, Rihito Kuroda, Shigetoshi Sugawa

Author Affiliations +

Proceedings Volume 9022, Image Sensors and Imaging Systems 2014; 90220L (2014) https://doi.org/10.1117/12.2040764
Event: IS&T/SPIE Electronic Imaging, 2014, San Francisco, California, United States

Abstract

In this paper, we demonstrate two types of new photodiode array (PDA) with fast readout speed and high stability to ultraviolet (UV) light exposure. One is a high full well capacity sensor specialized for absorption spectroscopy, the other one is a high sensitivity sensor for emission spectroscopy. By introducing multiple readout paths along the long side of the rectangle PD, both two PDAs have achieved more than 150 times faster readout speed compared with a general PDA structure with a single readout path along the short side of PD. By introducing a photodiode (PD) structure with a thin and steep dopant profile p+ layer formed on a flattened Si surface, a higher stability of the light sensitivity to UV light exposure was confirmed compared with a general PD structure for conventional PDAs.

Citation Download Citation

Takahiro Akutsu, Shun Kawada, Yasumasa Koda, Taiki Nakazawa, Rihito Kuroda, and Shigetoshi Sugawa "A 1024×1 linear photodiode array sensor with fast readout speed flexible pixel-level integration time and high stability to UV light exposure", Proc. SPIE 9022, Image Sensors and Imaging Systems 2014, 90220L (4 March 2014); https://doi.org/10.1117/12.2040764

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