MEMS based miniature FT-IR engine with built-in photodetector

Yoshihisa Warashina; Tomofumi Suzuki; Kohei Kasamori; Ryosuke Okumura; Yuki Matsuo; Mitsutaka Takemura

doi:10.1117/12.2038588

7 March 2014 MEMS based miniature FT-IR engine with built-in photodetector

Yoshihisa Warashina, Tomofumi Suzuki, Kohei Kasamori, Ryosuke Okumura, Yuki Matsuo, Mitsutaka Takemura

Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 89770E (2014) https://doi.org/10.1117/12.2038588
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

A MEMS-FTIR engine has been developed as a key device for the Fourier-Transform Infrared Spectrometer, which consists of a Michelson interferometer including an electro-static actuator to control a moving mirror, an optical fiber groove for incident light and a photodetector. All these elements except for the photodetector are monolithically fabricated in Silicon using MEMS technology. The optical elements such as a beam splitter, a fixed mirror and a moving mirror are formed and aligned simultaneously with high degree of precision by Deep Reactive Ion Etching (DRIE). The vertical side walls are utilized as optical planes so that the incident light path is located in parallel with the Silicon substrate. The moving mirror is driven by an electro-static MEMS actuator. The photodetector is placed above an angled mirror, which is formed by alkaline wet etching exposing the Silicon crystal plane at the end position of light path. All the elements including the photodetector are hermetically covered by a lid of Silicon in the vacuum chamber by using a surface activate bonding technology. In order to reduce the cost, wafer level process and separation of each chip by a laser dicer after all assembly processes are introduced. The realized MEMS-FTIR is 10×17×1 mm in size and a signal noise ratio (SNR) of better than 35dB, which comes from a good verticality of less than 0.2 degree in the vertical side walls as optical planes by managing the DRIE etching conditions.

Citation Download Citation

Yoshihisa Warashina, Tomofumi Suzuki, Kohei Kasamori, Ryosuke Okumura, Yuki Matsuo, and Mitsutaka Takemura "MEMS based miniature FT-IR engine with built-in photodetector", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770E (7 March 2014); https://doi.org/10.1117/12.2038588

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available