Design and fabrication of sub-wavelength annular apertures on fiber tip for femtosecond laser machining

Yen-Chun Tung; Ming-Han Chung; I-Hui Sung; Chih-Kung Lee

doi:10.1117/12.2039148

7 March 2014 Design and fabrication of sub-wavelength annular apertures on fiber tip for femtosecond laser machining

Yen-Chun Tung, Ming-Han Chung, I-Hui Sung, Chih-Kung Lee

Proceedings Volume 8973, Micromachining and Microfabrication Process Technology XIX; 89730M (2014) https://doi.org/10.1117/12.2039148
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

Adopting optical technique to pursue micromachining must make a compromise between the focal spot sizes the depth of focus. The focal spot size determines the minimum features can be fabricated. On the other hand, the depth of focus influences the ease of alignment in positioning the fabrication light beam. A typical approach to bypass the diffraction limit is to adopt the near-field approach, which has spot size in the range of the optical fiber tip. However, the depth of focus of the emitted light beam will be limited to tens of nanometers in most cases, which posts a difficult challenge to control the distance between the optical fiber tip and the sample to be machined optically. More specifically, problems remained in this machining approach, which include issues such as residue induced by laser ablation tends to deposit near the optical fiber tip and leads to loss of coupling efficiency. We proposed a method based on illuminating femtosecond laser through a sub-wavelength annular aperture on metallic film so as to produce Bessel light beam of sub-wavelength while maintaining large depth of focus first. To further advance the ease of use in one such system, producing sub-wavelength annular aperture on a single mode optical fiber head with sub-wavelength focusing ability is detailed. It is shown that this method can be applied in material machining with an emphasis to produce high aspect ratio structure. Simulations and experimental results are presented in this paper.

Citation Download Citation

Yen-Chun Tung, Ming-Han Chung, I-Hui Sung, and Chih-Kung Lee "Design and fabrication of sub-wavelength annular apertures on fiber tip for femtosecond laser machining", Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 89730M (7 March 2014); https://doi.org/10.1117/12.2039148

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