Isolating the negative stiffness region of a buckled Si/SiO2 membrane

Kyle K. Ziegler; Robert A. Lake; Ronald A. Coutu Jr.

doi:10.1117/12.2037383

7 March 2014 Isolating the negative stiffness region of a buckled Si/SiO₂ membrane

Kyle K. Ziegler, Robert A. Lake, Ronald A. Coutu Jr.

Proceedings Volume 8973, Micromachining and Microfabrication Process Technology XIX; 897304 (2014) https://doi.org/10.1117/12.2037383
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

Negative stiffness can provide a method of altering the stiffness of a device without changing its geometry. The silicon/ silicon dioxide (Si/SiO₂) membrane presented in this research utilizes buckling resulting from compressive residual stress. A transversely actuated buckled membrane displays properties similar to a linear regressive spring, which include a positive and negative stiffness region. Cantilever beams were used to restrict the outward displacement of the membrane and force it to actuate only in its negative stiffness region. Analytical equations were utilized to estimate the amount of outward deflection by the membrane and to estimate the amount of reduced deflection required for the device to display only negative stiffness characteristics. Devices were tested using a force sensor actuated by a piezo controller. Interferometric imaging confirmed the cantilevers ability to reduce the buckling displacement in the membrane up to 30%.

Citation Download Citation

Kyle K. Ziegler, Robert A. Lake, and Ronald A. Coutu Jr. "Isolating the negative stiffness region of a buckled Si/SiO₂ membrane", Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 897304 (7 March 2014); https://doi.org/10.1117/12.2037383

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available