Paper
27 June 1988 Optical Techniques For In-Situ, Real-Time Detection Of Laser-Induced Damage
P M Fauchet, I H Campbell
Author Affiliations +
Proceedings Volume 0895, Laser Optics for Intracavity and Extracavity Applications; (1988) https://doi.org/10.1117/12.944446
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Abstract
We are building an optical laboratory in which three complementary optical techniques: Raman scattering, sur-face second harmonic generation and photoluminescence, will be used to observe in-situ, in real-time the cumulative structural changes that occur during repeated illumination of solid surfaces. Such changes may be beneficial as in sem-iconductor processing but in general are detrimental, as in laser-induced damage of optical components. The evolution of stress, crystallinity, surface electronic properties and of the type and number of defects will be correlated with the appearance of damage spots during illumination sequences with below threshold pulses. From this, the mechanisms of multiple pulse damage will emerge and prediction of failure in components will become possible.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P M Fauchet and I H Campbell "Optical Techniques For In-Situ, Real-Time Detection Of Laser-Induced Damage", Proc. SPIE 0895, Laser Optics for Intracavity and Extracavity Applications, (27 June 1988); https://doi.org/10.1117/12.944446
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KEYWORDS
Silicon

Luminescence

Crystals

Raman spectroscopy

Raman scattering

Harmonic generation

Laser induced damage

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