Practical Excimer Laser Energy And Power Measurement: A Laser Manufacturer's Perspective.

Steven N Bittenson

doi:10.1117/12.944233

15 August 1988 Practical Excimer Laser Energy And Power Measurement: A Laser Manufacturer's Perspective.

Steven N Bittenson

Proceedings Volume 0888, Laser Beam Radiometry; (1988) https://doi.org/10.1117/12.944233
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

A discussion is presented of issues specific to the measurement of pulsed ultraviolet excimer laser radiation, emphasizing a need for the establishment of standards for pulse energy, average power, and beam dimensions.

Citation Download Citation

Steven N Bittenson "Practical Excimer Laser Energy And Power Measurement: A Laser Manufacturer's Perspective.", Proc. SPIE 0888, Laser Beam Radiometry, (15 August 1988); https://doi.org/10.1117/12.944233

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