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SCOTS is a high precision slope measurement technology based on deflectometry. Light pattern on a LCD display
illuminates the test surface and its reflected image is used to calculate the surface slope. SCOTS provides a high
dynamic range full field measurement of the optics without null optics required.
We report SCOTS tests on X-ray mirrors to nm and even sub nm level with precise calibration of the test system. A
LCD screen with dots/check board pattern was aligned into the system at the test mirror position to calibrate camera
imaging distortion in-situ. System errors were further eliminated by testing and subtracting a reference flat which was
also aligned at the same position as the test mirror. A virtual reference based on the ideal shape of the test surface was
calculated and subtracted from the test raw data. This makes the test a ‘virtual null’ test. Two X-ray mirrors were tested
with SCOTS. 0.1μrad (rms) slope precision and sub nm (rms) surface accuracy were achieved.
Run Huang,Peng Su,James H. Burge, andMourad Idir
"X-ray mirror metrology using SCOTS/deflectometry", Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480G (27 September 2013); https://doi.org/10.1117/12.2024500
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Run Huang, Peng Su, James H. Burge, Mourad Idir, "X-ray mirror metrology using SCOTS/deflectometry," Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480G (27 September 2013); https://doi.org/10.1117/12.2024500