Comparative analysis of absolute methods to test rotationally asymmetric surface deviation

Weihong Song; Xi Hou; Fan Wu; Wenchuan Zhao

doi:10.1117/12.2018219

13 May 2013 Comparative analysis of absolute methods to test rotationally asymmetric surface deviation

Weihong Song, Xi Hou, Fan Wu, Wenchuan Zhao

Proceedings Volume 8789, Modeling Aspects in Optical Metrology IV; 87890Z (2013) https://doi.org/10.1117/12.2018219
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

We have provided a comparative analysis of methods that involves multi-angle averaging, pseudo multi-angle averaging, single-rotation and variants based on the combinations. All these methods require measurement results being determined at rotational positions, serving for the interferometric measurement of rotationally asymmetric surface deviation of a specimen. Zernike coefficients and power spectral density (PSD) are computed and used for detailed comparison. The experimental results show that single-rotation method gives noticeably smoother result, thus it is limited to applications of measuring low spatial frequency deviations, taking the advantage of quick measurement time with fairly accurate rms results and potentially less influence of environment; in contrast, the result with multi-angle averaging contains more information of mid and high spatial frequency but it’s time-consuming. The pseudo multi-averaging method is the concise variant with fewer measurements. Its result contains more noise errors depending on the number of rotational measurements of multi-averaging method.

Citation Download Citation

Weihong Song, Xi Hou, Fan Wu, and Wenchuan Zhao "Comparative analysis of absolute methods to test rotationally asymmetric surface deviation", Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890Z (13 May 2013); https://doi.org/10.1117/12.2018219

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KEYWORDS

Spatial frequencies

Zernike polynomials

Environmental sensing

Time metrology

Interferometry

Metrology

Electronics

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