Wafer sub-layer impact in OPC/ORC models for 2x nm node implant layers

Jean-Christophe Le-Denmat; Catherine Martinelli; Elodie Sungauer; Jean-Christophe Michel; Emek Yesilada; Frederic Robert

doi:10.1117/12.2011424

12 April 2013 Wafer sub-layer impact in OPC/ORC models for 2x nm node implant layers

Jean-Christophe Le-Denmat, Catherine Martinelli, Elodie Sungauer, Jean-Christophe Michel, Emek Yesilada, Frederic Robert

Author Affiliations +

Proceedings Volume 8683, Optical Microlithography XXVI; 868314 (2013) https://doi.org/10.1117/12.2011424
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

From 28nm technology node and below, Optical Proximity Correction (OPC) needs to take into account light scattering effects from prior layers when bottom anti-reflective coating (BARC) is not used, which is typical for implant layers. In this paper, we implement a sub-layer aware simulation method into a verification tool for Optical Rule Check (ORC) that is used on full 28nm test chip. The sub-layer aware verification can predict defects that are missed by standard ORC. SEM-CD review and defectivity analysis were used to confirm the validity of the sub-layer aware model on wafer.

Citation Download Citation

Jean-Christophe Le-Denmat, Catherine Martinelli, Elodie Sungauer, Jean-Christophe Michel, Emek Yesilada, and Frederic Robert "Wafer sub-layer impact in OPC/ORC models for 2x nm node implant layers", Proc. SPIE 8683, Optical Microlithography XXVI, 868314 (12 April 2013); https://doi.org/10.1117/12.2011424

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